www.taiwannews.com.tw, May. 22, 2025 –
TAIPEI (Taiwan News) — Taiwan is not only a global leader in semiconductor production but also a pioneer in advancing the technology and sustainability of the high-tech facilities that support the industry.
While chipmaking often draws attention for breakthroughs in design and fabrication, the infrastructure behind it is just as critical. As nodes advance to 5-nm, 2-nm, and beyond, factories must meet growing demands in ultra-pure water, vibration control, and environmental systems, Business Today reported.
“It's not just wafer manufacturing that requires research and development,” said Chang Luh-maan (張陸滿), co-founder of the Taiwan High-Tech Facility Association. “Building the factory itself needs research and development too.”
To address these demands, Chang joined Hermes-Epitek Vice Chair Shu Chin-yung (許金榮) and TSMC Facility Division Vice President Arthur Chang (莊子壽) in founding the Semi High-Tech Facility Committee in 2013. It evolved into the Taiwan High-Tech Facility Association in 2021 and now serves as a hub for collaboration among fabs, equipment makers, and material suppliers.
Semiconductor production involves hundreds of steps, each relying on various chemical compounds. Many of these substances are hazardous and strictly regulated, according to Da-Yeh University.
“There is no doubt that the semiconductor industry uses a vast array of chemical substances, many of which are highly toxic,” said Chu Chin-lung (朱金龍), deputy director-general of Taiwan’s Occupational Safety and Health Administration. “This is why the sector has long been classified as a high-risk industry under intensified regulatory oversight.”
One of the association’s priorities is advancing facility technologies while promoting sustainability. Taiwan's semiconductor firms have adopted zero-waste goals, recycling strategies, and circular economy practices.
TSMC leads many of these efforts, including turning agricultural waste into activated carbon for its ultra-pure water systems. The company shares findings through the association to promote wider adoption across the industry.
A key example is the TSMC Zero Waste Center, which began operating in November at the Central Taiwan Science Park. The facility applies circular economy principles and is viewed as a model for sustainable chipmaking.